Device and unit for correcting aberration of light beam

摘要

An aberration correcting unit is provided for correcting an aberration of a light beam radiated onto an object to be detected and then reflected from the object. This unit comprises an aberration correcting device comprising a first corrector configured to correct the aberration of the light beam radiated onto the object; and a second corrector configured to correct the aberration of the light beam reflected from the object and to divide the reflected light beam into a plurality of light beams. The aberration correcting unit further comprises a first driver configured to drive the first corrector and a second driver configured to drive the second corrector.