| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method and manufacturing equipment for a metal master for making a stamper capable of efficiently manufacturing the metal master for making the stamper provided with a uniform annular groove in its circumferential direction. <P>SOLUTION: The manufacturing equipment 40 for the metal master is equipped with an immersion tank 44 for immersing an intermediate material 10 of the metal master for making the stamper masked except for an annular region 16 by housing the intermediate material 10 therein and storing an etchant capable of etching the intermediate material 10 and an air feeding means 46 for discharging bubbles and stirring the etchant of the immersion tank 44. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
