| 摘要 |
PROBLEM TO BE SOLVED: To provide an illumination optical system for obtaining an illumination flux having illuminance with high uniformity by highly efficiently using the light from a light source. SOLUTION: The system for optically operating an incident illumination flux as a roughly paralleled light flux is provided with: an optical integrator for performing a division and an re-combining operation for the light flux in a first axial direction on a cross-sectional surface approximately orthogonal to the travelling direction of the light flux; and a light intensity conversion means for converting a light intensity distribution in a second axial direction orthogonal to the first axial direction on the cross sectional surface. COPYRIGHT: (C)2004,JPO&NCIPI
|
