发明名称 SEMICONDUCTOR STRUCTURE ON AN EXTREMELY ROUGH SUBSTRATE
摘要 The invention relates to a semiconductor structure comprising a substrate (10) or a base layer having a surface whose rugosity is more than 0.5 nm RMS, or whose chemistry is not compatible with molecular adhesion; a layer (14) made of semiconductor material; an adhesion layer (12) disposed between the substrate or the base layer and the layer made of semiconductor material.
申请公布号 WO2004075287(A1) 申请公布日期 2004.09.02
申请号 WO2004FR00305 申请日期 2004.02.11
申请人 SOITEC SILICON ON INSULATOR;RAYSSAC OLIVIER;MARTINEZ MURIEL;BISSON SEPHORAH;PORTIGLIATTI LIONEL 发明人 RAYSSAC OLIVIER;MARTINEZ MURIEL;BISSON SEPHORAH;PORTIGLIATTI LIONEL
分类号 H01L21/762 主分类号 H01L21/762
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