发明名称
摘要 PROBLEM TO BE SOLVED: To provide a magnetoresistive effect device which is easy to design the bias point and has high sensitivity and high reliability, a magnetic head, a magnetic head assembly and a magnetic recorder. SOLUTION: The magnetoresistive effect element has an oxide or a nitride magnetoresistive effect improving layer in a spin valve film. For forming the magnetoresistive effect improving layer, oxygen gas is introduced in an oxidizing chamber approximately at the same time as the irradiation with a rare gas ion plasma after completing the irradiating preparation thereof. This improves the controllability while exposing at a low oxygen rate and a high energy oxidation having an energy assist effect with the rare gas ion or rare gas ion plasma can be realized.
申请公布号 JP3559513(B2) 申请公布日期 2004.09.02
申请号 JP20000269099 申请日期 2000.09.05
申请人 发明人
分类号 G01R33/09;G11B5/39;H01F10/10;H01F10/32;H01F41/18;H01L43/08;H01L43/12;H05H1/42;H05H1/46 主分类号 G01R33/09
代理机构 代理人
主权项
地址