发明名称 |
Surface inspection apparatus |
摘要 |
A surface inspection apparatus for detecting foreign matter and the like on a surface of a substrate by projecting and scanning laser beams to the surface of the substrate, comprising a light source unit for projecting two or more laser beams, and a projecting optical system for converging the laser beams so that the two or more laser beams are aligned in a row in a direction perpendicularly crossing the scanning direction at a projecting point on the substrate.
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申请公布号 |
US2004169853(A1) |
申请公布日期 |
2004.09.02 |
申请号 |
US20040775684 |
申请日期 |
2004.02.10 |
申请人 |
IWA YOICHIRO;MIYAKAWA KAZUHIRO;SEKINE AKIHIKO |
发明人 |
IWA YOICHIRO;MIYAKAWA KAZUHIRO;SEKINE AKIHIKO |
分类号 |
G01B11/30;G01N21/95;G01N21/956;H01L21/66;(IPC1-7):G01N21/88 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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