SCANNING MIRROR WITH 2 DEGREES OF FREEDOM AND MANUFACTURING METHOD THEREOF

摘要

A scanning mirror with two degrees of freedom comprises: a fixed frame; a rotary frame provided within the fixed frame with an interval, and rotated with respect to a first rotation axis; a mirror provided within the rotary frame with an interval, and rotated with respect to a second rotation axis; a permanent mirror provided below the rotary frame and the mirror; a rotary frame driving conductive line, formed on the rotary frame, for generating a first torque to the rotary frame; a mirror driving conductive line, formed on the rotary frame and the mirror, for generating a second torque to the mirror; a compensation conductive line formed to correspond to the mirror driving conductive line, and insulated from the mirror driving conductive line; a rotary frame spring for connecting the fixed frame and the rotary frame; and a mirror spring for connecting the rotary frame and the mirror.