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发明名称
摘要
申请公布号
JP2004526868(A)
申请公布日期
2004.09.02
申请号
JP20020588618
申请日期
2002.05.03
申请人
发明人
分类号
C23C14/34;C23C14/04;C23C14/35;H01J37/32;H01J37/34;H01L21/285;H01L21/3213;H01L21/768;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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