| 摘要 |
PROBLEM TO BE SOLVED: To surely inspect a workpiece to be inspected in absorbing an error with a simple structure if there is a difference in center axis of a probe and that of the workpiece. SOLUTION: An inspecting system 100 comprises an inspecting device body 101, a stage 102 on which the workpiece to be inspected is mounted, a probing device 103 provided over the stage 102, and a elevating device 104 for elevating the probing device 103. The probing device 103 comprises a probing body 107 connected to a coaxial connector 105a on a printed board 105, and a probe holder 108 for slidably holding a probing body 107 within a constant range from a center of a fixed position. COPYRIGHT: (C)2004,JPO&NCIPI
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