| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for detecting object breakage or the like by using an ultrasonic wave without touching an ultrasonic vibrator at every inspection and without complicated signal processing. SOLUTION: The ultrasonic vibrator 4 is mounted on an inspection object 5 and left as it is, and the ultrasonic wave having the same time waveform is transmitted at every inspection. The ultrasonic wave is propagated through the object, and a part thereof is reflected by the end face or the like and returned to the ultrasonic vibrator. A reception waveform at the normal time is recorded beforehand in a storage device 9. When an abnormality such as the object breakage is generated, the reception waveform is deformed, and the abnormality can be detected by performing simple comparison with the waveform at the normal time in a signal processing circuit 8. COPYRIGHT: (C)2004,JPO&NCIPI
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