VERFAHREN UND VORRICHTUNG ZUR RÜCKGEWINNUNG VON EDELGAS,申请号DE19986025275-传众专利搜索

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发明名称	VERFAHREN UND VORRICHTUNG ZUR RÜCKGEWINNUNG VON EDELGAS
摘要
申请公布号	DE69825275(D1)	申请公布日期	2004.09.02
申请号	DE19986025275	申请日期	1998.11.27
申请人	NIPPON SANSO CORP., TOKIO/TOKYO;OHMI, TADAHIRO	发明人	OHMI, TADAHIRO;ISHIHARA, YOSHIO
分类号	B01D53/46;B01D53/00;B01J3/00;C01B23/00;C23C16/44;(IPC1-7):B01J3/02;H01L21/205;H01L21/203;C23C16/50;C23F4/00	主分类号	B01D53/46
代理机构		代理人
主权项
地址

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