| 摘要 |
A polishing apparatus for polishing a workpiece to a flat mirror finish includes a turntable (5) with a polishing cloth (6) attached to an upper surface thereof, and a top ring (1) for holding a workpiece (4) thereon and pressing the workpiece (4) against the polishing cloth (6) to polish the workpiece (41). A retainer ring (3) or a presser ring is disposed around the top ring (1). The retainer ring (3) or the presser ring is vertically movable independently of the top ring (1), and pressed against the polishing cloth (6) by a pressing mechanism. A stabilizing mechanism (70) is disposed between an inner circumferential surface of the retainer ring (3) or the presser ring, and an outer circumferential surface of the top ring (1), for holding the top ring (1) substantially stabilized within the retainer ring (3) or the presser ring. <IMAGE> |
