| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a silica porous body having excellent air permeability, containing small impurity and having communicating pores, and a method of manufacturing the same. <P>SOLUTION: The silica porous body has porosity of 30-88% and communicating pores having average particle diameter of 1μm to 10 mm and the purity of≥95%. In the method of manufacturing the silica porous body having porosity of 30-88% and communicating pores having average particle diameter of 1μm to 10 mm, silicon foam having the communicating pores is fired at 950-1,500°C in an oxidizing atmosphere. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
