发明名称 CAPACITOR AND ITS FABRICATING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a capacitor in which the operating characteristics of a semiconductor device can be ensured by ensuring the dielectric strength of a dielectric layer. SOLUTION: Both the lower electrode layer 2 and the upper electrode layer 4 constituting a capacitor 13 are composed not of a polysilicon based semiconductor requiring ion doping but of a metal not requiring ion doping. Contrary to a case where the upper electrode layer 4 is composed of a semiconductor, ion doping for forming a semiconductor is not required when the upper electrode layer 4 is formed and thereby structural defects, e.g. a pinhole, incident to ion doping can be eliminated from the dielectric layer 3. Since dielectric strength of the dielectric layer 3 is ensured, a defective display can be prevented from occurring in the display image of a liquid crystal display. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004247501(A) 申请公布日期 2004.09.02
申请号 JP20030035459 申请日期 2003.02.13
申请人 SONY CORP;ST LCD KK 发明人 UKAI YASUHIRO;HOSODA KOJI
分类号 G02F1/1368;H01L21/822;H01L21/8234;H01L27/04;H01L27/06;(IPC1-7):H01L21/822;G02F1/136;H01L21/823 主分类号 G02F1/1368
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