| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device having high measuring precision of aberration of a wave surface by making detection of the aberration of the wave surface possible by a Moire fringe, having a good contrast while using a F<SB>2</SB>laser of a wavelength of 157 nm. SOLUTION: The measuring device is a device for measuring an aberration of wave surface of a measuring body and comprises: a light focusing optical system focusing an emission light from a light source on a body or an image; a reflection light system having a center of curvature, arranged on the image of the body or on the surface of the body under measurement; a detection optical system for observation of the Moire fringe, wherein the F<SB>2</SB>laser is used for the light source. COPYRIGHT: (C)2004,JPO&NCIPI
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