ELECTROSTATIC MICROACTUATOR HAVING ELECTRICALLY INSULATED MOVING PART, AND RELATED DRIVING CIRCUIT

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic microactuator which can be driven by a low driving voltage, and to provide a driving circuit. SOLUTION: The rotary electrostatic microactuator has a frame 140 possessing two stationary electrodes of one set which drives the microactuator 114 counterclockwise and another set which drives the microactuator clockwise and movable electrodes 156 and 156' which are held between the stationary electrodes. A layer 143 of an insulating material is arranged between an outer wall with the movable electrodes mounted and the remaining portion of the frame in such a manner that the movable electrodes are insulated. The frame 140 is maintained at ground potential and the movable electrodes are maintained at specified potential which is not zero. The microactuator is driven by impressing a positive or negative voltage to one set of the stationary electrodes and impressing an opposite voltage to the other set in the state of maintaining the same at the specified potential which is not zero. COPYRIGHT: (C)2004,JPO&NCIPI