| 摘要 |
PROBLEM TO BE SOLVED: To specify an emission direction of an optical beam in a resonation type optical scanning device. SOLUTION: A micro scanner 100 comprises a movable part 110 having movable comb teeth 112 and 114 as a mirror 116 reflecting laser light and a comb-toothed electrode, and a fixing part 120 swingably supporting the movable part 110 in the direction of rotation. The fixing part 120 is provided with drive fixing comb teeth 122a and 124a and detection fixing comb teeth 122b and 124b as comb-toothed electrodes opposed to the movable comb teeth 112 and 114. The laser light is scanned by vibrating the movable part 110 in a reciprocative manner by electrostatic attractive force in the direction of the rotation, by applying pulse voltage between the movable comb teeth 112 and 114 and the drive fixing comb teeth 122a and 124a. The emission direction of the laser light is specified by detecting the rotated angle of the movable part on the basis of change of an electrostatic capacity between the movable comb teeth 112 and 114 and the detection fixing comb teeth 122b and 124b. COPYRIGHT: (C)2004,JPO&NCIPI
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