发明名称 Sintered body and film forming method using the same
摘要 A sintered body comprising 95 Wt % or more germanium and tungsten. The sputtering is executed by using sintered body as a target, thereby forming a resistance film to a spacer of an image forming apparatus using electron beam emitting devices and the like. Thus, the resistance film having excellent controllability and high reproducibility can be stably formed.
申请公布号 US2004168907(A1) 申请公布日期 2004.09.02
申请号 US20040761290 申请日期 2004.01.22
申请人 SATO TORU 发明人 SATO TORU
分类号 C22C1/04;C23C14/06;C23C14/34;H01J9/18;H01J9/24;H01J29/02;H01J29/86;H01J29/88;H01J31/12;(IPC1-7):C23C14/32 主分类号 C22C1/04
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