| 摘要 |
PROBLEM TO BE SOLVED: To control the heat transmitted from a susceptor into a support member and to relax the stress concentrated on the support member even when the susceptor is at a high temperature, in the mounting structure of the suspector and supporting member. SOLUTION: The mounting structure is equipped with the susceptor 2 for heating an object to be treated, the support member 7 which is joined to the suspector 2 and in which an inside space 6 is formed, and a chamber which is provided with an opening joined to the support member 7. The opening of the chamber and the inside space of the support member are communicated each other, and the inside space of the support member is airtightly sealed for the inside space of the chamber. The support member 7 includes a cylindrical body 7b and an diameter-increased portion 7a located at an end on the side of the susceptor 2 of the support member 7. One round portion 13 or a plurality of continuous round portions are located between the body 7b and the diameter-increased portion 7a in an outside profile 7f of a longitudial section of the support member 7. COPYRIGHT: (C)2004,JPO&NCIPI |
