| 摘要 |
PROBLEM TO BE SOLVED: To improve the adhesion property of an SOG film and a base oxide film. SOLUTION: Recesses and projections in a several ten nanometers order are formed on the surface of the base oxide film 3. Thus, a contact area between the SOG film 6 and the base oxide film 3 is increased, and the adhesion property between the SOG film 6 and the base oxide film 3 is improved. COPYRIGHT: (C)2004,JPO&NCIPI
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