| 摘要 |
PROBLEM TO BE SOLVED: To provide an in-line type processing apparatus for a substrate (glass substrate), which keeps the substrate uniformly at a prescribed temperature in a short period of time. SOLUTION: A temperature regulating means 3 is arranged below a transfer line composed of a large number of continuous rollers 2. The temperature regulation means 3 is composed of two temperature regulating solution spouting nozzles 4 each arranged between the continuous rollers 2 and a chiller 5 which feeds liquid (developing solution or water) whose temperature is controlled to the nozzles 4. A slit for spouting a temperature regulating solution against the rear surface of the glass substrate W is provided to the top surface of the temperature regulating solution spouting nozzle 4, and the length of the slit is set nearly equal to the width of the glass substrate W. COPYRIGHT: (C)2004,JPO&NCIPI
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