| 摘要 |
PROBLEM TO BE SOLVED: To provide a high vacuum analyzer including a preliminary exhaust chamber 20 before a analyzing chamber 10 wherein a degree of vacuum of the preliminary exhaust chamber is made higher for a short time and contamination of a sample S and walls of the analyzing chamber caused by residual gas is prevented. SOLUTION: The high vacuum analyzer includes a heating means (heaters 23) which heats the preliminary exhaust chamber 20, a cooling means (a circulation passage 24 of liquefied inert gas) which cools down the preliminary exhaust chamber 20 after heating, and a gas substituting means that substitutes an atmosphere of the preliminary exhaust chamber 20 with the inert gas. COPYRIGHT: (C)2004,JPO&NCIPI
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