ROTARY SURFACE PLATE FOR DOUBLE-SIDED LAPPING MACHINE

摘要

PROBLEM TO BE SOLVED: To provide a surface plate for a double-sided lapping machine, reducing attractive force of a glass plate and a lapping surface in polishing a glass plate such as a hard disc for magnetic storage and a liquid crystal display. SOLUTION: This rotary surface plate for a both-sided lapping machine is formed by concentrically fixing diamond polishing pieces 15 formed by sintering metal powder and diamond powder to an elongated square bar having predetermined thickness and width at spaces from each other with a predetermined area percentage on the lapping surface of a pair of upper and lower rotary surface plates 3. COPYRIGHT: (C)2004,JPO&NCIPI