| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-stick position control device which automatically controls the location and position of a micro-stick in a manner being out of contact therewith without being influenced by the optical properties of the object, and also to provide a micro-stick position control method. SOLUTION: The device is provided with cameras (4, 4'), a beam output section (7), a focus shifting section (12) for changing an optical path of beams, a converging section for converging the beams via the focus shifting section (12), and a control section (5). The micro-stick (3) has a refractive index higher than that of a medium on the periphery thereof. The control section (5) extracts a skeletal line of the micro-stick (3) from an image of the same obtained by the cameras (4, 4') as a scanning track, and controls the focus shifting section (12) such that the beams passing through the focus shifting section (12) are converged to the scanning track by the converging section and that a focus reciprocatively scans the scanning track to change the optical path of the beams, to thereby grasp the micro-stick (3). Further, the control section controls the focus shifting section (12) to change the focus of the beams to a designated location. COPYRIGHT: (C)2004,JPO&NCIPI
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