发明名称 |
BACKSIDE THINNING OF IMAGE ARRAY DEVICES |
摘要 |
Backthinning in an area selective manner is applied to imaging sensors 12 for use in electron bombarded devices. A further arrangement results in an array of collimators 51 aligned with pixels 42 or groups of pixels providing improved image contrast of such image sensor. Provision of a thin P-doped layer 52 on the illuminated rear surface provides both a diffusion barrier resulting in improved resolution and a functional shield for reference pixels. A gradient in concentration of P-doped layer 52 optimizes electron collection at the pixel array.
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申请公布号 |
US2004169248(A1) |
申请公布日期 |
2004.09.02 |
申请号 |
US20040795040 |
申请日期 |
2004.03.05 |
申请人 |
INTEVAC, INC. |
发明人 |
COSTELLO KENNETH A.;FAIRBAIRN KEVIN P.;BROWN DAVID W.;CHUNG YUN;GOBER PATRICIA;YIN EDWARD |
分类号 |
H01J31/26;H01L;H01L21/00;H01L27/146;H01L29/04;H01L29/06;H01L31/00;H01L31/062;H01L31/113;(IPC1-7):H01L21/00 |
主分类号 |
H01J31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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