| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a resist coating device and method for suppressing the proper timing of the end of dropping for a board to be treated with various sizes(coating areas) without designating the timing of the end of dropping with a recipe. <P>SOLUTION: This resist coating device 101 is provided with a chuck 3, a rotation motor 5, a nozzle 7, a pressure feeding pump 8, a storage reservoir 9, a chamber 10, a drainage mouth 11, a light emitting part 103 for irradiating droplets 6a of resist 6 with irradiation lights 102a, a light receiving part 104 for measuring the light quantity of reflected lights 102b as the alternative characteristics of the quantity of droplets, and a dropping operation control part 105 whose one end is connected to the light receiving part 104 and whose other end is connected to the pressure feeding pump 8 for stopping the pressure feeding pump 8 to end the dropping of the resist 6 based on the light quantity measurement result of the reflected lights 102b. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
