发明名称 |
METHOD FOR IMMERSING A SUBSTRATE |
摘要 |
Embodiments of the invention generally provide a method for immersing a substrate into a fluid solution. The method includes loading a substrate into a receiving member configured to support the substrate in a face down orientation, tilting the receiving member to a first tilt angle measured from horizontal, displacing the receiving member toward the fluid solution, and tilting the receiving member to a second tilt angle measured from horizontal during the displacing. |
申请公布号 |
WO2004075266(A2) |
申请公布日期 |
2004.09.02 |
申请号 |
WO2004US04478 |
申请日期 |
2004.02.18 |
申请人 |
APPLIED MATERIALS, INC.;LUBOMIRSKY, DMITRY;YANG, MICHAEL, X. |
发明人 |
LUBOMIRSKY, DMITRY;YANG, MICHAEL, X. |
分类号 |
C25D7/12;C25D21/00;C25D21/04;H01L21/00;H01L21/288;H01L21/31 |
主分类号 |
C25D7/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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