| 摘要 |
<P>PROBLEM TO BE SOLVED: To lengthen the service life of a piezoelectric actuator without need for suppressing a duty ratio, even under use in the vacuum with a particularly severe condition. <P>SOLUTION: In this piezoelectric actuator 7 which vibrates an piezoelectric element 12 by applying a voltage to the piezoelectric element 12 and drives a movable body with the vibration, the radiation rates of the surface of the piezoelectric element 12 and the internal surface of a casing 11 are set so as to be ≥0.7. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
