| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a diamond lapping surface plate, achieving grinding with high flatness without variation in thickness of a plate-like material hard to grind. <P>SOLUTION: In this diamond lapping surface plate, a plurality of diamond pellets are fixed to a surface plate 1. A plurality of segments 3 formed of grinding abrasives are fixed like a ring to the outer peripheral part and the inner peripheral part of the lapping surface plate. The pellets 2 formed by bonding diamond by a binder are fixed in an area sandwiched by the segments of the outer peripheral part and the inner peripheral part. A grinding wheel, the abrasive grains of which are Al<SB>2</SB>O<SB>3</SB>abrasive grain or SiC abrasive grain and the grade of which ranges from G to J, is cited as the grinding wheel. The pellet 2 is formed by bonding diamond particles by a binder and substantially uniformly disposed on a lapping machine. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
