| 摘要 |
PROBLEM TO BE SOLVED: To provide a lapping device which stably provides desired surface roughness of a workpiece even if the same portion of an abrasive surface of a lapping film is used for machining a plurality of times. SOLUTION: The lapping device has: a holding means for rotatably holding the workpiece W; the lapping film 1 formed of a thin substrate and abrasive grains attached to one surface of the same; at least two shoes 2a, 2b for pressing the abrasive surface of the lapping film 1 to the workpiece W; a take-up reel 6 for feeding the lapping film 1 during suspension of the machining; and a washing means arranged in a passage through which the lapping film 1 is fed, at a location between the two shoes 2a, 2b, for washing the abrasive surface of the lapping film 1. COPYRIGHT: (C)2004,JPO&NCIPI |
