发明名称 SOLID STATE IMAGING ELEMENT AND ITS MANUFACTURING METHOD AND PORTABLE ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a solid state imaging element having excellent mass productivity by suppressing the variations of the sensitivity of a photodetecting diode and securing a sufficient margin for the alignment deviation. SOLUTION: The solid state imaging element has a p-type well region 16 provided on an n-type layer 15 provided on a p-type substrate 14, and a plurality of unit pixels 10A each having the photodetecting region of the photodetecting diode 11 and the charge storage region 17 of a MOS transistor 12 in the p-type well region 16. The method for manufacturing the solid state imaging element includes a step of simultaneously forming the p-type well region 16 in the same impurity introducing step over the forming region of the photodetecting diode 11 and the forming region of the MOS transistor 12. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004247407(A) 申请公布日期 2004.09.02
申请号 JP20030033870 申请日期 2003.02.12
申请人 SHARP CORP;INNOTECH CORP 发明人 KONISHI TAKEFUMI;KAWAJIRI KAZUHIRO
分类号 H01L27/146;H01L21/76;H04N5/335;H04N5/369;H04N5/374;(IPC1-7):H01L27/146 主分类号 H01L27/146
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