| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspecting device that enables a glass substrate to visually be observed by lowering an eyepoint position even when the height position of a stage is raised. SOLUTION: An image formed by an objective optical system 20 is formed through an imaging lens 30 and the formed image is transmitted in respective horizontal extension lens barrels 6 and 4 equipped with relay optical systems that transmit the image almost in parallel to an inspection surface for the glass substrate 8; and images transmitted by the relay optical systems in the horizontal extension lens barrels 6 and 4 are transmitted downward by a relay optical system in a vertical extension lens barrel 45 and the image transmitted in the vertical extension lens barrel 45 is visually observed through oculars 49 of an observation optical system 50. COPYRIGHT: (C)2004,JPO&NCIPI
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