摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrator which has large generation capacity, and an ultrasonic motor which has large driving force, equipped with this vibrator. <P>SOLUTION: The vibrator 1 has a vertical vibration part, where a piezoelectric element 4a is arranged on the ZX face of a structure 3a, a flexural vibration part 2b where piezoelectric elements 4b and 4c are arranged on the XY face of the structure 3b, shoe members 6a and 6b, a retention member 7 for holding the flexural vibration part 2b, a pushing means 8 which pushes the shoe members 6a and 6b against a body 80 to be shifted, and a fixing means 9 which fixes the pushing means 8. It shifts the body 80 to be shifted, by applying a specified drive voltage to piezoelectric elements 4a-4c, thereby extending and contracting the vertical vibrating part 2a to vibrate in the X direction and also by flexurally vibrating the flexural vibration part 2b in the Z direction, and thereby generating elliptic travelling waves in the shoe members 6a and 6b. <P>COPYRIGHT: (C)2004,JPO&NCIPI |