| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing member capable of restraining roll-off by always realizing a condition that an end edge of a polished member intersects with an edge part of a groove of a poslishing member diagonally at an appropriate angle when the end edge slides in contact with an edge part . <P>SOLUTION: This polishing member has a polishing face rotated around an axial core along a perspective direction relative to a polished material. A plurality of grooves 3 for fluidizing polishing slurry outward in a face direction from a rotation center side are formed on the polishing face along a reference curve L. The reference curve is set to such a curve that a cross angle θ<SB>0</SB>of a tangent A at a given point on the curve and a straight line B passing through the given point and the rotation centers of the polishing face becomes constant. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
