RECHARGE DEVICE, INGOT PULL-UP APPARATUS, AND METHOD OF MANUFACTURING INGOT

摘要

PROBLEM TO BE SOLVED: To provide a recharge device for a silicon single crystal pull-up apparatus, which can improve the problems of a conventional hopper that a lump material 50 melts and sticks on a bottom cover or forms a bridge by thermal expansion and does not fall because the lump material 50 is heated by the radiation heat from a melt 38. SOLUTION: In a hopper 30 having a nearly cylindrical hopper main body 32 made of quartz glass, a conical bottom cover 36 for opening and closing the lower end opening part of the hopper main body 32 and a shaft 34 for suspending the bottom cover 36, quartz glass including air bubbles is used as the material of the bottom cover 36. COPYRIGHT: (C)2004,JPO&NCIPI