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发明名称
VERFAHREN UND GERAET ZUR UEBERWACHUNG VON NIEDERSCHLAEGE AUF DER INNENOBERFLAECHE EINER PLASMABARBEITUNGSKAMMER
摘要
申请公布号
DE69820041(T2)
申请公布日期
2004.09.02
申请号
DE1998620041T
申请日期
1998.03.26
申请人
LAM RESEARCH CORP., FREMONT
发明人
KENNEDY, S.;LAMM, J.;WICKER, E.;MARASCHIN, A.
分类号
H01J37/32;H01L21/205;H01L21/302;(IPC1-7):H01J37/32
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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