PLASMA TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a plasma treatment device capable of uniformly and axisymmetrically generating plasma to uniformly and stably process a sample surface.

SOLUTION: This plasma treatment device is equipped with: a vacuum treatment vessel 101 made of a conductive material; a sample base 108 installed in the treatment vessel 101 for mounting a sample on the upper surface thereof; an inner tube member 110 made of a dielectric material and disposed so as to cover the inside wall surface of the vacuum vessel 101; and an earthing member 111 for mounting the tube member 110 to the inside wall surface of the treatment vessel 101; and used for applying a plasma treatment to the sample. The earthing member 111 is formed with a projection 111a projecting to the inside of the vessel from the inside wall surface of the vessel 101, and a bent part 111b bent upward from the projection; a deflection preventing member formed of a projecting 201 is formed on the inside wall surface of the vessel 101; and the tube member 110 is mounted in contact with the deflection preventing member on the projecting part.

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