| 摘要 |
<P>PROBLEM TO BE SOLVED: To eliminate a thick film occurring at the end of the coated region and to increase a film forming part in effective region when liquid material is applied on an optional region with a coating head with a slit-shaped opening. <P>SOLUTION: A coating film forming device is equipped with a coating unit which discharges out coating liquid on a coated substrate through a slit-shaped opening provided on a coating head, and is relatively moved in the direction perpendicular to the lengthwise direction of the slit-shaped opening to carry out a coating operation; a coated substrate transfer chamber composed of a tray unit where the coated substrates are held; and an air-flow generating unit which produces a flow of air in an atmosphere inside a chamber. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
