| 摘要 |
PROBLEM TO BE SOLVED: To provide a lapping device which has shoes each having a large contact area and contributing to stable machining and improved machining quality of a workpiece. SOLUTION: The lapping device has a lapping film 1 consisting of a thin substrate 3 and abrasive grains arranged on one surface of the substrate, and a pressing means 10 for pressing an abrasive surface 2 of the lapping film 1 onto the workpiece W. The pressing means 10 is formed of elastically deformable shoes 11, 20, 30, and a thrusting means 12 for thrusting and deforming the shoes 11, 20, 30 with a predetermined thrust force along a surface to be machined. COPYRIGHT: (C)2004,JPO&NCIPI |
