| 摘要 |
PROBLEM TO BE SOLVED: To provide a lapping machine high in the machining efficiency of a work by oscillating a lapping film itself, simplified in structure, achieving stable machining, and having high machining quality, workability and productivity. SOLUTION: This lapping machine includes: a lapping film 1 having abrasive grains on one surface of a thin base material; a shoe 2 disposed on the back of the lapping film 1; a shoe pressing means for pressing the shoe 2 toward the machined surface of the work W to press the abrasive grain surface of the lapping film 1 to the work; a rotary driving means for driving the work W to rotate; and an oscillation means for applying relative oscillation between the work W and the lapping film 1. The oscillation means has a film oscillation mechanism 32 for reciprocating the lapping film 1 in the feeding direction of the lapping film 1 at a speed higher than at least the rotational speed of the work W. COPYRIGHT: (C)2004,JPO&NCIPI |
