| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply unit that is compact and light-weight. SOLUTION: This is a gas supply unit that has a base member 20, two or more fluid control devices, and flow channel blocks 11 installed on the top surface of the base member 20 and the bottom surface of the fluid control devices so as to communicate the fluid control devices with each other. One of the multiple flow channel blocks has an airtight filter chamber 33 formed between an input port 31 and an output port 32 and a filter 34 housed in the filter chamber 33. COPYRIGHT: (C)2004,JPO&NCIPI
|
