| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing particles uniform in a particle diameter in a reaction vessel. SOLUTION: The particle manufacturing apparatus has a reaction vessel 1, a gas introducing portion 2 introducing a raw material gas and a reaction inhibitor generating gas, an inert gas introducing portion introducing a carrier gas into the reaction vessel 1, a heater 5 provided in the reaction vessel 1, and a discharge portion 6 to control the growth of particles by using the reaction of formation of particles and its reverse reaction. COPYRIGHT: (C)2004,JPO&NCIPI
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