| 摘要 |
PROBLEM TO BE SOLVED: To provide a cooling device and method which brings about a desired imaging performance by reducing the deformation of an optical member due to thermal expansion, which would cause the degradation of the imaging performance without transmitting vibration, and also to provide an aligner including the cooling device. SOLUTION: The cooling device for cooling the optical member located in a vacuum atmosphere comprises a Peltier element located in contact with the optical member, a radiation board located at a prescribed space face to face with a face of the Peltier element opposite to the one in contact with the optical member, and a radiation shielding member which prevents the heat exchange by radiation of the radiation board with the Peltier element except for the face opposite to the one in contact with the optical member. COPYRIGHT: (C)2004,JPO&NCIPI
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