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发明名称
可调式气体分配板组件
摘要
本发明提供一种气体分配板组件及一在一制程室中用于分配气体之方法。在一具体实施例中,一气体分配板组件包括一耦合至一扩散板之调整板。该调整板具有复数个通过该调整板而形成之孔洞,该等孔洞会对准复数个通过扩散板而形成之开口,其中该等开口各具有比在该调整板内之孔要大之断面积。各开口系对准一各自的孔以界定通过该气体分配板组件之气体通道。该调整板可与一替换调整板互换,以改变通过该气体分配板组件之气体流动特征。
申请公布号
TW200416297
申请公布日期
2004.09.01
申请号
TW093100376
申请日期
2004.01.07
申请人
应用材料股份有限公司
发明人
白隆尼根温德T BLONIGAN, WENDELL T.;怀特约翰M WHITE, JOHN M.;巴格雷威廉A BAGLEY, WILLIAM A.
分类号
C23C16/44
主分类号
C23C16/44
代理机构
代理人
蔡坤财
主权项
地址
美国
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