METHOD FOR FABRICATING A THIN FILM DEVICE AND THE THIN FILM DEVICE TO PREVENT THAT A MEDICINAL FLUID SOAKS IN A DEVICE LAYER

摘要

PURPOSE: A method for fabricating a thin film device and the thin film device are provided to prevent that a medicinal fluid soaks in a device layer when separating or removing a fabrication substrate. CONSTITUTION: A protective layer and a device layer(121) are successively formed on the first substrate(101). The second substrate(124) adheres on the device layer through the first adhesive layer(123) or through a coating layer and the first adhesive layer. The first substrate is perfectly or partially separated or removed by an etching process using a medicinal fluid. The protective layer adheres to the third layer through the second adhesive layer. The second substrate is separated or removed. The protective layer is formed as the first resistant HF layer(102) and the second resistant HF layer(104) which have tolerance with respect to the medicinal fluid used when separating or removing the first substrate.