| 摘要 |
A test probe alignment apparatus includes a rotatable theta stage that is decoupled from a workpiece positioning stage so that the workpiece positioning stage can move a workpiece in an X-Y plane without moving the theta stage, thereby inhibiting vibration in and inertia of the workpiece positioning stage, and improving the speed and accuracy of workpiece movements. The theta stage is driven for rotation about an axis substantially perpendicular to the X-Y plane. The rotatable stage supports a carriage adapted for holding a probe card. The carriage rotates in concert with the theta stage to thereby align the probe card relative to the workpiece. A Z-stage is operatively engaged with the carriage for moving the carriage along the axis of rotation relative to the workpiece. A computer processor performs coordinate transformations on preprogrammed movement vectors, to adjust for angular misalignment of the workpiece as measured by a position sensor. |
