| 摘要 |
<p>A deposition process which is suitably for depositing metal oxide thin films, such as films of transparent conducting oxides, onto a substrate, comprises feeding a decomposable metal-polymer composition (5) to a nebuliser (7) with a carrier gas, to form an aerosol. The aerosol is contacted with a substrate (11), which is heated to or above the decomposition temperature of the polymer, causing metal oxide to be deposited on the substrate.</p> |
