发明名称 Method of dicing a semiconductor wafer and heat sink into individual semiconductor integrated circuits
摘要 A method of producing semiconductor devices including the steps of providing a semiconductor wafer of substantially uniform thickness 22, providing a heat-radiating plate 22, and attaching the heat-radiating plate 20 to the semiconductor wafer. The assembled wafer and heat-radiating plate are diced into individual semiconductor integrated circuits having individual heat radiating plates attached thereto.
申请公布号 US6784022(B2) 申请公布日期 2004.08.31
申请号 US20020120757 申请日期 2002.04.11
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 UMEHARA NORITO;AMAGAI MASAZUMI
分类号 H01L23/29;H01L21/68;H01L23/433;H01L23/495;H01L23/544;(IPC1-7):H01L21/48 主分类号 H01L23/29
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