发明名称 |
Method of dicing a semiconductor wafer and heat sink into individual semiconductor integrated circuits |
摘要 |
A method of producing semiconductor devices including the steps of providing a semiconductor wafer of substantially uniform thickness 22, providing a heat-radiating plate 22, and attaching the heat-radiating plate 20 to the semiconductor wafer. The assembled wafer and heat-radiating plate are diced into individual semiconductor integrated circuits having individual heat radiating plates attached thereto.
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申请公布号 |
US6784022(B2) |
申请公布日期 |
2004.08.31 |
申请号 |
US20020120757 |
申请日期 |
2002.04.11 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
UMEHARA NORITO;AMAGAI MASAZUMI |
分类号 |
H01L23/29;H01L21/68;H01L23/433;H01L23/495;H01L23/544;(IPC1-7):H01L21/48 |
主分类号 |
H01L23/29 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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