| 摘要 |
22A temperature and/or pressure compensated microbalance is disclosed. Temperature compensation is achieved by applying heat to at least a part of the microbalance, measuring a temperature-dependent variable, and controlling the amount of heat applied to the microbalance to keep the temperature-dependent variable substantially constant. In one embodiment, the heat is applied to the microbalance by passing electrical current through a resistive element provided on or embedded in the oscillating element of the microbalance. Pressure compensation is achieved by taking into account the variation in the mass or density of fluid passing through the microbalance. Various materials and methods of construction are also disclosed, including micro-machining and electroforming.
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