SEMICONDUCTOR PROCESS CHAMBER ELECTRODE,申请号IL19990161056-传众专利搜索

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发明名称	SEMICONDUCTOR PROCESS CHAMBER ELECTRODE
摘要
申请公布号	IL161056(D0)	申请公布日期	2004.08.31
申请号	IL19990161056	申请日期	1999.06.15
申请人	LAM RESEARCH CORPORATION	发明人
分类号	H01J;(IPC1-7):H01J	主分类号	H01J
代理机构		代理人
主权项
地址

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